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We summarized The present progress standing from the higher-power DUV laser both within the wavelength of FHG with the 1-μm laser and at 193 nm. The the latest progress in the good-state/fiber laser, and also the nonlinear optical crystals, prompts not just the normal power and also the beam high quality (coherence) on the DUV lasers to an unparalleled amount.
For instance, The existing concave OC could be replaced by a plane mirror which could mitigate the power density about the surface of M1 as well as diamond. Also, making use of higher damage threshold coatings for M1 and diamond would also Enhance the output power with no damages. Then, the NIR laser at the 2nd Stokes wavelength may very well be substantial enough, and also its fantastic beam quality, to crank out the final DUV laser at 193 nm that has a large ordinary electrical power.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the best non-linear crystal which generates ultraviolet harmonics on the Nd:YAG basic laser wavelength. As a way to improve the hurt threshold, reduced CLBO floor roughness, by extremely-precision machining, is necessary. As the CLBO crystal has effortless hydroscopic reaction and micro scratches in machining, ultra-specific machining of the CLBO crystal is actually a challenging technical problem.
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